Green Semiconductor Manufacturing Process Research TeamAbout
Make semiconductor technologies sustainable.
The amount of CO₂ emissions associated with the use of ICT continues to increase every year. Not only the hardware operation, but also the semiconductor device production significantly contributes to greenhouse gas (GHG). To achieve a carbon-neutral society by 2050, it is essential to make the semiconductor manufacturing toward greener and more sustainable. We are developing Green Manufacturing Metrics (GMM) as indicators for evaluating environmental impact. Based on GMM, we are investigating environmental-friendly materials and processes that minimize GHG emissions without compromising semiconductor performance. We are also working on novel materials that enable ultra-low-power device operation.
