Semiconductors are used in various aspects of our daily lives and have become indispensable for solving social issues and strengthening industrial competitiveness. The recent digital transformation (DX), which promotes the use of data, and the green transformation (GX), which aims for decarbonization, are further accelerating this trend. As a result, semiconductors are becoming increasingly important from an economic security perspective. The "Semiconductor and Digital Industry Strategy" (released in June 2021 and revised in June 2023) by the Ministry of Economy, Trade and Industry (METI) clearly states the policy to secure the semiconductor manufacturing base in our country and to promote the establishment of next-generation technologies and R&D for future technologies. AIST has been formulating the "Next Generation Computing Infrastructure Strategy" (June 2022) and has been conducting research and development to realize the goals of the strategy. Semiconductor Frontier Research Center (SFRC) aims to accelerate these activities and ensure advanced semiconductor technology in Japan. The SFRC also aims to become a Center of Excellence (COE) for promoting open innovation in advanced semiconductors through consistent implementation of research and development, construction of shared pilot lines, social implementation, and human resource development.
Development of basic technologies for nanosheet CMOS manufacturing process
A breakthrough in FET integration limits by 3D stacking technologies
A challenge for the scaling limit of Si-based COMS circuits using 2D semiconductor materials
We will conduct research and development of advanced semiconductor manufacturing technologies, such as GAA-FET, using the pilot line constructing into super clean room facility with a floor area of 3000 m2 in AIST, collaboration with companies, universities and national institutes etc.
Semiconductors are indispensable for solving various social issues and for the digital transformation (DX) of society. It is no exaggeration to say that semiconductors are the very foundation of industry. Semiconductors are indispensable to keep society and economy running smoothly, and therefore, how to secure these semiconductors has become an extremely important issue from the viewpoint of economic security as well as energy. In particular, further performance improvement is essential for the realization of AI processing semiconductor integrated circuits, including generative AI, which has been the focus of much attention in recent years. In other words, it is essential to promote further miniaturization and integration of semiconductors. The Semiconductor Frontier Research Center (SFRC), armed with innovative semiconductor process and material technologies and state-of-the-art manufacturing equipment, is developing the process and material technologies necessary to realize highly competitive semiconductors smaller than the 2nm generation (Beyond 2nm). Also we aim to realize AIST's mission of solving social issues and strengthening industrial competitiveness by implementing the developed semiconductor technologies in society as quickly as possible.