Large pressure balance for hydraulic pressures of up to 1 GPa
Calibration system for high gas pressure
Automatic calibration system for barometric pressure gauges
Calibration system of vacuum gauges for extremely highly vacuum (XHV)
Calibration system for mass spectrometer
Calibration system for leak artefacts for sniffer tests
Calbration system for vacuum gauges by means of Boyle's law
We are developing, maintaining and providing the national standards of pressure, vacuum and leak. The pressure and vacuum standards are the basis of the pressure/vacuum measurements using pressure gauges or vacuum gauges. The standards are also the fundamental technology to support the leading-edge industries such as the aviation safety, semiconductor or flat-panel display manufacturing. Leak standards are the basis of the leak locating, and are used in the field of Freon gas leaks of the air-conditioners and hydrogen gas leaks of the fuel cell veihcles.
We are continuing our research and development on upgrading our standards ranging from ultra-high vacuum to ultra-high pressure to meet the strong demands from the industries.
We also support the Japan Calibration Service System (JCSS) through the calibration services to the accredited calibration laboratories.
Research Themes
- Expanding the calibration range of pressure, vacuum and leak stadards with lower uncertainties and the confirmation of the intenational equivalnece.
- Development of the pricese "In situ" calibtaion method for pressure gauges
- Research on the reliability of the vacuum gauges, leak artefacts, and leak detectors by using the vacuum and leak standards.
- Development of the "In situ" calibraion method for vacuum gauges and partial pressure gauges.
Contact
Group leader
E-mail: <at> aist.go.jp