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Quantum Device Research Team

  • Industrialization of quantum technology requires high integration of superconducting quantum chips and silicon photonics, and also the development of cryo-CMOS and superconducting digital circuits as control circuits. Achieve high yield and throughput development of semiconductor and superconductor circuit fabrication technology.
  • Supporting the practical application of quantum computers and the development of large-scale quantum computers by enhancing superconductor and semiconductor quantum device fabrication capabilities of Qufab and COLOMODE.
  • Development of technology for high-density mounting of wires for highly integrated quantum chips by applying precision processing technology.


  • The Superconducting Quantum Circuit Fabrication Facility


    We manage the The Superconducting Quantum Circuit Fabrication Facility (Qufab). This facility operates a 4-inch device prototyping line and provides process utilization and prototyping services. Qufab is capable of handling superconducting qubits and circuits, superconducting digital-analog integrated circuits, and superconducting 3D implementations.


    Staff Members

    photo position & name field of expertise
    Team Leader,
    Go FUJII
    Joint Appointed Fellow,
    Kazumasa MAKISE
    Joint Appointed Fellow,
    Daiyu KONDO
    Specific Technical Senior Officer,
    Koh-ichi NITTOH
    Specific Technical Senior Officer,
    Toshiaki OBATA
    Senior Expert,
    Iku HIRANO
    Senior Researcher,
    Nobuyuki ZEN
    Superconductivity arising in a phonon-engineered metallic film ; Superconducting particle detectors
    Senior Researcher,
    Yoshiro URADE
    Superconducting quantum circuits towards fault-tolerant quantum computers
    Researcher,
    Yuichi FUJITA
    Research and development of technologies for large-scale integrated circuits of superconducting quantum bit
    Researcher,
    Fumihiro CHINA
    Research on superconducting logic circuits and superconducting device fabrication
    Invited Senior Researcher,
    Mutsuo HIDAKA
    Invited Senior Researcher,
    Tetsuro SATO
    Invited Senior Researcher,
    Yukihiro TOMINARI
    Concurrent post,
    Hirotake YAMAMORI
    Concurrent post,
    Katsuya KIKUCHI
    Research and development of three-dimensional integrated circuit technology
    Concurrent post,
    Naoya WATANABE
    Research on process technology for three-dimensional integrated circuits
    Concurrent post,
    Yuuki ARAGA
    Analysis and measurement of electromagnetic interference among 3-D stacked ICs ; Development of method to stack superconductive chips using micro-bump or direct bonding
    Concurrent post,
    Takahiro MORI
    Concurrent post,
    Hidehiro ASAI
    Concurrent post,
    Kimihiko KATO
    Silicon tunnel field-effect transistor ; Silicon quantum bit
    Concurrent post,
    Hiroshi OKA
    Semiconductor Device Technology for Quantum Computers ; Development of high-mobility Transitors
    Concurrent post,
    Shota IIZUKA
    Development of Silicon quantum bit
    Concurrent post,
    Takumi INABA

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