Applied Nanoscopic Measurement Group

Fig.1
Time-of-Flight secondary ion mass spectrometry
using a cluster ion beam (Cluster TOF-SIMS)

R&D of technologies for mass spectrometry of nanomaterials featuring surfaces, interfaces and thin films

We conduct R&D of technologies for mass spectrometry, using laser and ion beams, and structure analysis of organic molecules using mass spectrometry. Our focuses are

• Photoionization mass spectrometry with laser beams

• Secondary ion mass spectrometry with cluster ion beams

• Structure analysis of organic molecules using mass spectrometry

Fig.2
Overview of the system for partial pressure
measurement with a quartz oscillator
(developed with a private company)

R&D of technologies for measurement, analysis and evaluation of nanomaterials processing

We conduct R&D of technologies for measurement, analysis, and evaluation of macroscopic and microscopic states of gas during nanomaterials processing. Our focuses are

• Partial pressure measurement with quartz oscillators
• Detection and monitoring of activated reaction intermediates in such process as oxidation

Fig.3Spectral-Intensity Dispersion-Canceled
Optical Coherence Tomography

R&D of technologies for diagnostics and monitoring of biological bodies and environment

We conduct R&D for technologies of tomographic imaging using light interference. Our focus is

• Tomographic imaging by using light interference and controlling intensity correlation and optical wave front