Straightness
Fig. 1 Ultra-high-accuracy surface profiler.
Flatness is one of the important dimensional parameters. Highly precise flatness is recently required in the areas of photomasks, silicon wafers, liquid crystal panels, optical elements, and industrial flatness reference standards. We provide calibration service of flatness by the originally developed large Fizeau interferometer.
There is an growing demand for highly accurate large-diameter surface profile. To meet the requirements for large optics and more precise measurements, a profiler based on deflectometry has been developed.
Range: 50 mm to 1050 mm, Line profile measurement based on deflectometry
| Expanded Uncertainty(k=2) | Measurement Conditions | Accreditation |
|---|---|---|
| 5.0 nm |