Flatness
Fig. 1 Fizeau interferometer for flatness calibration.
Flatness is one of the important dimensional parameters. Highly precise flatness is recently required in the areas of photomasks, silicon wafers, liquid crystal panels, optical elements, and industrial flatness reference standards. We have originally developed large Fizeau interferometer which has calibration capability of 10 nm (k = 2) for diameter of 300 mm.
Range: up to 300 mm (12 inches), based on Fizeau interferometer
| Expanded Uncertainty(k=2) | Measurement Conditions | Accreditation |
|---|---|---|
| 10 nm | ASNITE, KCDB (New window will open.) |
Calibration Authority
KONDO YohanInternational Comparison Participated
| Comparison ID | Type | Time | Transfer devices | KCDB (New window will open.) |
|---|---|---|---|---|
| APMP.L-S8 | APMP supplementary comparison | 2015-2016 | Optical flats (diameter 60 mm and 150 mm) | APMP.L-S8 |
| EURAMET.L-S28 | EURAMET supplementary comparison | 2020-2021 | Optical flat with a diameter of 330 mm made of Zerodur | EURAMET.L-S28 |