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Research

Research themes on various length measurement techniques are shown below.

High-precision laser interferometer module

High-precision interferometer module

Prism pair interferometer

Prism-Pair Interferometer

Research results

Papers

[2024] [2023] [2022] [2021]

Reviews, books, etc.

[2024]

Conference presentations

[2024]
  • Shusei Masuda, Yohan Kondo, Akiko Hirai, Youichi Bitou, "Scanning deflectometric profiler based on self-calibrationg rotary encoder", IMEKO 2024 XXIV World Congress, August 2024.

Lectures etc.

[2024]
  • Akiko Hirai and Youichi Bitou, "Double-sided Interferometer for SI-traceable Thickness Measurement", CLEO Pacific Rim, August 2024.
  • Akiko Hirai and Youichi Bitou, "Double-sided interferometer for precise thickness measurements", Optical Technology and Measurement for Industrial Applications (OPTM), Optics and Photonics International Congress (OPIC) 2024, April 2024.
[2021]
  • Akiko Hirai, "Precise measurement of the thickness of silicon wafers and bilateral comparison," PRESM2020, November, 2020.

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