Device

• Deposition
• Lithography/ Cleaning
• Etching/ Planarization
• Observation/ Measurement

Observation/ Measurement

水平方向にスクロールできます。

	Device name	Model	Specification
	Scanning Electron Microscope (SEM)	Hitachi, Ltd. Regulus8230
	Nano Search Microscope	Shimadzu Corporation ST-4500
	Semi-automatic Evaluation System	FormFactor SUMMIT200
	Spectroscopic film thickness measurement	Otsuka Electronics Co., Ltd. OPTM
	Step profiler	KLA Japan office P-16