Device

• Deposition
• Lithography/ Cleaning
• Etching/ Planarization
• Observation/ Measurement

Lithography/ Cleaning

水平方向にスクロールできます。

	Device name	Model	Specification
	i-Line stepper	Canon FPA-3030i5+
	Coater/ Developer	Tokyo Electron Limited ACT8
	Semi-Auto-Developer	Sofu engineering SDS-3200M
	Single wafer cleaner A	KSLO-A150CBU
	Single wafer cleaner B	KSLO-A150CBU
	Wafer cleaning equipment	Mimasu Semiconductor Industry Co., Ltd. MSC-2000SSK