Device
Etching/ Planarization
水平方向にスクロールできます。
| Device name | Model | Specification | |
|---|---|---|---|
 |
CMP system | Tokyo Seimitsu Co., Ltd. ChaMP | |
 |
Fluorine-based ICP-RIE | Samco RIE-400iP4 | |
 |
ICP-RIE machine | Samco RIE-400iP3 | |
 |
ICP-RIE machine | Ulvac CE-300I | |
 |
Parallel Plate RIE | Samco RIE-200L | |
 |
Parallel Plate RIE | Ulvac CE-300R | |
 |
Parallel Plate RIE | Samco RIE-10NR | |
 |
Ion Milling System | RMTec J-500L | |
 |
Ashing system | Canon MAS-8220AT |