Members
| MISUMI, Ichiko | Leader, group | All activities of the group |
| AZUMA, Yasushi | Senior Researcher | X-ray reflectance method (XRR) |
| KASHIWAGI, Tomoya | Researcher | Focused ion beam scanning electron microscopy (FIB-SEM) |
| KATO, Haruhisa | Chief Senior Researcher | Material property evaluation using light, magnetic fields, electric fields, and X-rays |
| KIZU, Ryosuke | Senior Researcher | Metrological atomic force microscopy (M-AFM) |
| KOBAYASHI, Keita | Senior Researcher | Transmission electron microscopy (TEM) |
| KUMAGAI, Kazuhiro | (Additional post) | Scanning electron microscopy (SEM) |
| ZHANG, Lulu | Senior Researcher | X-ray photoelectron spectroscopy (XPS) |
| NAKAMURA, Ayako | (Additional post) | Material property evaluation using light, magnetic fields, electric fields, and X-rays |
Only the names of full-time employees are revealed.