Members
| MISUMI, Ichiko | Leader, group | All activities of the group |
| AZUMA, Yasushi | Senior Researcher | High-precision film thickness measurement technology for nano-thin films |
| KATO, Haruhisa | Chief Senior Researcher | Development of characterization methods for nanomaterials |
| KIZU, Ryosuke | Senior Researcher | Research on nano dimensional standards technology using metrological atomic force microscopes |
| KOBAYASHI, Keita | Senior Researcher | Research on nano dimensional standards technology using transmission electron microscopes |
| KUMAGAI, Kazuhiro | (Additional post) | Research on nano dimensional standards technology using scanning electron microscopes |
| ZHANG, Lulu | Senior Researcher | Surface analysis of Si spheres for kilogram indication |
| NAKAMURA, Ayako | (Additional post) | Development of characterization methods for nanomaterials |
Only the names of full-time employees are revealed.