Nanodimensional Standards Group

Nanodimensional Standards Group
Research Institute for Material and Chemical Measurement (RIMCM)
National Metrology Institute of Japan (NMIJ)
National Institute of Advanced Industrial Science and Technology (AIST)

last updated 2021.5
What's New

Experimental evaluation of uncertainty in sub-nanometer metrology using transmission electron microscopy due to magnification variation (Measurement Science and Technology)


写真 Nanoscale Standards by Metrological AFM and Other Instruments (IOP ebooks)

The pages of "Member" and "Article" have been updated due to personnel changes.

Evaluating SEM-based LER metrology using a metrological tilting-AFM (SPIE Proceedings)

Evaluation of Image Distortion in SEM by Using a Dot-Array Based Certified Reference Material (Microscopy)

"Line edge roughness measurement on vertical sidewall for reference metrology using a metrological tilting atomic force microscope (J. of Micro/Nanolithography, MEMS, and MOEMS)" is one of the papers with many downloads in 2020. Editor-in-Chief of the Journal showed his appreciation for submitting a good quality paper to the journal.

Direct comparison of line edge roughness measurements by SEM and a metrological tilting-atomic force microscopy for reference metrology (J. of Micro/Nanolithography, MEMS, and MOEMS)

Development of NMIJ CRM 5207-a tungsten dot-array for the image sharpness evaluation in scanning electron microscopy – structure evaluation and determination of dot-pitch (Microscopy)

Elucidation of tellurium biogenic nanoparticles in garlic, Allium sativum, by inductively coupled plasma-mass spectrometry (Journal of Trace Elements in Medicine and Biology)

"Characterization of the Volume-based or Number-based Size Distribution for Silica Nanoparticles Using a Unique Combination of Online Dynamic Light Scattering Having a Uni-tau Multi-bit Correlator and High-resolution Centrifugal Field-Flow Fractionation Separator (Analytical Sciences)" was selected as one of Hot Articles − Volume 36, Number 6 (2020)

Topics in the past.