“Toward Reducing CO2 Emissions from Ultra-Pure Semiconductor Gases: A Case Study of TEOS Purification Process Optimization and Renewable Feedstock Utilization”
Takehiro Yamaki, Noriyuki Uchida, Thuy T. H. Nguyen, Soh Takemoto, Naoya Okada, Hiroki Hatayama, Masanaga Fukasawa, Shinji Migita, Sho Kataoka