パルス加熱サーモリフレクタンス法の開発

• 測定装置の開発

  • Naoyuki Taketoshi, Tetsuya Baba and Akira Ono, "Development of a thermal diffusivity measurement system using a picosecond thermoreflectance technique", High Temperatures High Pressures, 29, (1997), 59-66

  • Naoyuki Taketoshi, Tetsuya Baba and Akira Ono, " Observation of Heat Diffusion across Submicrometer Metal Thin Films Using a Picoscond Thermoreflectacne Technique", Japanese Journal of Applied Physics, 38, (1999), L1268-L1271

  • 薄膜熱物性計測技術の開発, 産総研TODAY, 3(11),13(2003)

  • Tetsuya Baba, Naoyuki Taketoshi, and Takashi Yagi, “Development of Ultrafast Laser Flash Methods for Measuring Thermophysical Properties of Thin Films and Boundary Thermal Resistances”, Japanese Journal of Applied Physics, 50, (2011), 11RA01

• パルス加熱サーモリフレクタンス法で得られる温度履歴曲線と測定条件の検討

  • Naoyuki Taketoshi, Tetsuya Baba and Akira Ono, "Development of thermal diffusivity measurement system for metal thin films using a picosecond thermoreflectance technique", Measurement Science and Technology, 12, (2001), 2064-2073

    
    

• パルス加熱サーモリフレクタンス法における位相信号を測定する原理

  • Naoyuki Taketoshi, Tetsuya Baba, Emanuel Schaub and Akira Ono, "Homodyne detection technique using spontaneously generated reference signal in picosecond thermoreflectance measurements", Review of Scientific Instruments, 74, (2003), 5226-5230

  
  

• 2台のパルスレーザを用いた測定装置

  • Naoyuki Taketoshi, Tetsuya Baba and Akira Ono, "Electrical delay technique in the picosecond thermoreflectance method for thermophysical property measurements of thin films", Review of Scientific Instruments, 76, (2005), 094903

  
  

• シリコン基板上の薄膜の測定

  • Shakhawat Hossain Firoz, Takashi Yagi, Naoyuki Taketoshi Kazuko Ishikawa and Tetsuya Baba, "Direct observation of thermal energy transfer across the metal thin film on silicon substrates by rear heating-front detection thermoreflectance technique", Measurement Science and Technology, 22, (2011), 024012

  
  

• 面積熱拡散時間法の原理：単層、2層、3層の解析と界面熱抵抗の導出

  • Tetsuya Baba, "Analysis of One-dimensional Heat Diffusion after Light Pulse Heating by the Response Function Method", Japanese Journal of Applied Physics, 48, (2009), 05EB04

  
  

• 面積熱拡散時間法を無限層数に拡張した理論

  • Kenichi Kobayashi and Tetsuya Baba, "Extension of the Response Time Method and the Areal Heat Diffusion Time Method for One-Dimensional Heat Diffusion after Impulse Heating: Generalization Considering Heat Sources inside of Multilayer and General Boundary Conditions", Japanese Journal of Applied Physics, 48, (2009), 05EB05

薄膜の熱拡散時間の標準

• Tetsuya Baba, "Measurements and data of thermophysical properties traceable to a metrological standard", Metrologia, 47, (2010), S143-S155

• 薄膜の熱拡散間標準の開発と供給, 産総研TODAY, 8(5), 31,(2008)

• Tetuya Baba, Naofumi Yamada, Naoyuki Taketoshi, Hiromichi Watanabe, Megumi Akoshima, Takashi Yagi, Haruka Abe and Yuichiro Yamashita, "Research and development of metrological standards for thermophysical properties of solids in the National Metrology Institute of Japan", High Temperatures-High Pressures, Volume 39, Number 4, (2010), 279-306

薄膜材料の熱物性

• 透明導電膜

  • Takashi Yagi, Kimiaki Tamano, Yasushi Sato, Naoyuki Taketoshi, Tetsuya Baba and Yuzo Shigesato, "Analysis on thermal properties of tin doped indium oxide films by picosecond thermoreflectance measurement", Journal of Vacuum Science & Technology A, 23,(2005), 1180-1186

  • Toru Ashida, Amica Miyamura, Yasushi Sato, Takashi Yagi, Naoyuki Taketoshi, Tetsuya Baba and Yuzo Shigesato, "Effect of electrical properties on thermal diffusivity of amorphous indium zinc oxide films", Journal of Vacuum Science & Technology A, 25, (2006), 1178-1183

  • Toru Ashida, Amica Miyamura, Nobuto Oka, Asushi Sato, Takashi Yagi, Naoyuki Taketoshi, Tetsuya Baba and Yuzo Shigesato, "Thermal transport properties of polycrystalline tin-doped indium oxide films", Journal of Applied Physics, 105, (2009), 073709

  • Chihiro Tasaki, Nobuto Oka, Takashi Yagi, Naoyuki Taketoshi, Tetsuya Baba, Toshihisa Kamiyama, Shin-ichi Nakamura and Yuzo Shigesato "Thermophysical Properties of Transparent Conductive Nb-Doped Ti02 Films" Japanese Journal of Applied Physics 51 (2012) 035802
  
  

• 金属薄膜

  • Naoyuki Taketoshi, Takashi Yagi and Tetsuya Baba, "Effect of Synthesis Condition on Thermal Diffusivity of Molybdenum Thin Films Observed by a Picosecond Light Pulse Thermoreflectance Method", Japanese Journal of Applied Physics, 48, (2009), 05EC01

• AlN薄膜

  • Takashi Yagi, Nobuto Oka, Takashi Okabe, Naoyuki Taketoshi, Tetsuya Baba and Yuzo Shigesato, "Effect of Oxygen Impurity on Thermal Diffusivity of AlN Thin Films Deposited by Reactive rf Magnetron Sputtering", Japanese Journal of Applied Physics, 50, (2011), 11RB01

  
  

• 有機EL膜

  • Nobuto Oka, Kazuki Kato, Takashi Yagi, Naoyuki Taketoshi, Tetsuya Baba, Norihiro Ito, and Yuzo Shigesato, "Thermal diffusivities of Tris(8-hydroxyquinoline)aluminum and N,N'-Di(1-naphthyl)-N,N'-diphenylbenzidine Thin Films with Sub-Hundred Nanometer Thicknesses", Japanese Journal of Applied Physics, 49, (2010), 121602
  
  

  • Nobuto Oka, Kazuki Kato, Takashi Yagi, Naoyuki Taketoshi, Tetsuya Baba, and Yuzo Shigesato, "Thermal Boundary Resistance between N,N'-Bis(1-naphthyl)-N,N' -diphenylbenzidine and Aluminum Films", Japanese Journal of Applied Physics, 50, (2011), 11RB02
    

• 光記録材料

  • M. Kuwahara, O. Suzuki, N. Taketoshi, Y. Yamakawa, T. Yagi, P. Fons, K. Tsutsumi, M. Suzuki, T. Fukaya, J. Tominaga T. Baba, "Measurements of Temperature Dependence of Optical and Thermal Properties of Optical Disk Materials", Japanese Journal of Applied Physics, 45, (2006), 1419-1421

  • M. Kuwahara, O. Suzuki, Y. Yamakawa, N. Taketoshi, T. Yagi, P. Fons, T. Fukaya, J. Tominaga, T. Baba, "Measurement of the thermal conductivity of nanometer scale thin films by thermoreflectance phenomenon", Microelectronic Engineering, 84, (2007),1792-1796

  • M. Kuwahara, O. Suzuki, N. Taketoshi, T. Yagi, P. Fons, J. Tominaga, T. Baba, "Thermal Conductivity Measurements of Sb-Te Alloy Thin Films Using a Nanosecond Thermoreflectance Measurement System", Japanese Journal of Applied Physics, 46, (2007), 6863-6864

  • M. Kuwahara, O. Suzuki, Y. Yamakawa, N. Taketoshi, T. Yagi, P. Fons, T. Fukaya, J. Tominaga, T. Baba, "Temperature Dependence of the Thermal Properties of Optical Memory Materials", Japanese Journal of Applied Physics, 46, (2007), 3909-3911

  • M. Kuwahara, O. Suzuki, K. Tsutsumi, T. Yagi, N. Taketoshi, H. Kato, R. E. Simpson, M. Suzuki, J. Tominaga, and T. Baba, "Measurement of Refractive Index, Specific Heat Capacity, and Thermal Conductivity for Ag_6.0In_4.5Sb_60.8Te_28.7 at High Temperature", Japanese Journal of Applied Physics, 48, (2009), 05EC02
  
  

• 相変化メモリ

  • R. E. Simpson, P. Fons, A. V. Kolobov, T. Fukaya, M. Krbal, T. Yagi and J. Tominaga, "Interfacial phase-change memory", Nature Nanotechnology, (2011), 3 July 2011, DOI:10.10.38/NNANO.2011.96

  
  

• 熱電材料

  • S. Higomo, T. Yagi, H. Obara, A. Yamamoto, K. Ueno, T. Iida, N. Taketoshi and T. Baba, "Thermoelectric properties of Bi₂Te₃ based thin films fabricated by pulsed laser deposition", Mater. Res. Soc. Symp. Proc., Vol. 1044, (2008), Materials Research Society 1044-U09-08

  
  

• 無機薄膜/界面熱抵抗

  • Nobuto Oka, Ryo Arisawa, Amica Miyamura, Yasushi Sato, Takashi Yagi, Naoyuki Taketoshi, Tetsuya Baba and Yuzo Shigesato, "Thermophysical properties of aluminum oxide and molybdenum layered films", Thin Solid Films, 518, (2010), 3119-3121

• データベース
  • Yuichiro Yamashita, Takashi Yagi, and Tetsuya　Baba: "Development of Network Databese System for Thermophysical Property Data of Thin Films",Japanese Journal of Applied Physics, 50, (2011), 11RH03
  
  

微小領域の熱物性計測技術

• N. Taketoshi, M. Ozawa, H. Ohta, T. Baba, "Thermal effusivity distribution measurements using a thermoreflectance technique", AIP Conf. Proc. of Photoacoustic and Photothermal Phenomena, 463,(1999), 315-317

• Takashi Yagi, Naoyuki Taketoshi and Hideyuki Kato, "Distribution analysis of thermal effusivity for sub-micrometer YBCO thin films using thermal microscope", Physica C, 412-414,(2004), 1337-1342

• 超電導プロジェクトにおける薄膜熱特性評価技術, 産総研TODAY, 4(12), 31(2004)

• Kimihito Hatori, Naoyuki Taketoshi, Tetsuya Baba and Hiromichi Ohta, "Thermoreflectance technique to measure thermal effusivity distribution with high spatial resolution", Review of Scientific Instruments, 76, (2005) ,114901

• 池内　賢朗，八木　貴志，加藤　英幸, "局所熱浸透率測定装置を用いた薄膜の熱浸透率の分布測定", 低温工学, 40巻, 8号, (2005), 335-339

薄膜における熱の非拡散現象の観察

• Fumishige Nakamura, Naoyuki Taketoshi, Takashi Yagi and Tetsuya Baba, "Observation of thermal transfer across Pt thin film at low temperature using femtosecond light pulse thermoreflectance method", Measurement Science and Technology, 22, (2011), 024013

新しい計測技術の開発

• 超高圧での熱拡散率測定

  • Takashi Yagi, Kenji Ohta, Kenichi Kobayashi, Naoyuki Taketoshi, Kei Hirose and Tetsuya Baba, "Thermal diffusivity measurement in a diamond anvil cell using a light pulse thermoreflectance technique", Measurement Science and Technology, 22, (2011), 024011

  
  

• 薄膜の実用測定装置

  • 薄膜の熱拡散率を測定する新しい実用器を開発, 産総研TODAY, 10(11), 17(2010)