International Symposium on Integrated Microsystems

  First International Symposium on Integrated Microsystems (ISIM2011) will be held on 10th Feb. 2011 at Tsukuba Japan.
  One of the main topics of this symposium is to share and discuss the most recent achievements of the project "Integrated Microsystems", conducted under the direction by Professor Esashi at Tohoku University, main researcher of one of the Japanese Funding Programs for World-Leading Innovative R&D on Science and Technology (FIRST).

The other object of the symposium is to discuss about the international collaboration on MEMS industry promotion among the attendees from different backgrounds and nationalities. We would like to share and discuss about the ideal platform for MEMS industrialization to fill the commercialization gap from R&D, prototype to large scale production.  

Symposium Date : 2011/02/10 (Thu) 09:30-19:30
Venue :
Epochal Tsukuba Convention Hall 300, Conference Room 101

Registration and Visit of Green 8 Inch MEMS Prototype Station (TKB812)
Satellite workshop: GDMS 2011
Date : 2011/02/09 (Wed)
Venue :

Symposium Program 
Project report (9:30-11:50)    
09:30  Introduction of the “Integrated Microsystems” project   Prof. M.Esashi  Tohoku Univ. 
09:40  Initial stage prototyping for the hetero integration   Prof. S.Tanaka Tohoku Univ. 
10:00  Hands-on access to fabrication facility   Prof. K.Totsu Tohoku Univ. 
10:20  Massive parallel EB exposure systems   Prof. M.Esashi  Tohoku Univ. 
10:40  Introduction of the “Research Center for Ubiquitous MEMS and Micro Engineering”   Dr. R.Maeda  AIST 
11:00  Production stage prototyping for the hetero integration   Dr. T.Kobayashi  AIST 
11:20  High efficiency integrated MEMS production technology   Dr. H.Takagi  AIST 
11:40  Lunch and poster session
"International collaboration and MEMS foundry – from R&D prototyping to production –"  (13:00-16:55)
12:40  MEMS Commercialization: Bridging the Gap from Prototype to Production  Mr. Prakash Krishnan SVTC (USA)  
13:00  Imec CMORE SiGe MEMS Technology Platform  Dr. Stephane Donnay  IMEC (Belgium)  
13:20  MEMS, Advanced Microsystems, and their Integration in the Léti's Platforms  Dr. Andre Rouzaud LETI (France)
13:40  Smart Systems Integration by using Advanced MEMS Technologies  Prof. Thomas Gessner Fraunhofer ENAS (Germany)  
14:00  MEMS for Biological Applications and Energy  Prof. Candido Fabrizio PIRRI Torino Institute of Technology (Italy)
14:20  Wafer-Level Heterogeneous Integration Techniques for MEMS and IC Prof. Goran Stemme Royal Institute of Technology KTH (Sweden)
14:40  “Total Solution for MEMS Application -Relations with Worldwide Nanotech Centers-  Mr. Susumu Kaminaga Sumitomo Precision (Japan)

Coffee break

15:30  MEMS OMRON Way   Dr. Y.Sekiguchi OMRON (Japan) 
15:50  New Age of MEMS Large Wafer Scale Production  Dr. K.Suzuki  Dainippon printing (Japan) 
16:10  MEMS Process Integration and Volume Production  Dr. Jerwei Hsieh APM (Taiwan) 
16:30  Introduction of the RFID/USN Center” and the MEMS in Korea  Dr. Kyeong Keun Choi   RFID/USN Center (Korea) 
16:50 Closing
Dinner and Poster Sessoin

 ISIM2011 Secretariat
 c/o Echizen & Associates
 Tokan Shinjuku Bldg., 603
 Nishi-Shinjuku 3-6-5, Shinjuku Tokyo, 160-0023 Japan
 phone: 81-3-3346-8007   fax: 81-3-3346-8002

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