材料研究者とデバイス研究者の連携により、窒化物やダイヤモンドなどのコア技術の研究開発を持続的に発展させると共に、 産業化/社会実装に向けたプロセス技術や将来のセンサに必要な要素技術の開発を実施しています。

次世代弾性波フィルタ・強誘電体デバイス、自動車や室内のガスモニタリング、
宇宙・海中などの極限環境下での高感度磁気計測、半導体製造（後工程）

1）Mutsunori Uenuma, Ryota Atsumi, Kentaro Onishi, Hiroto Tomita, Shougo Yamada, Yuya Yamada, Momoko Yoshida, Zexu Sun, Yusuke Hashimoto, Mami N. Fujii, Takuma Kobayashi, Heiji Watanabe, Tomohiro Matsushita, Yukiharu Uraoka,
"Effect of Post-Deposition Annealing on Atomic Ordered Structure of Gallium Oxide Layer at SiO2/GaN Interface" , Phys. Status Solidi B, 2500025 (2025)

2）Takanori Takahashi, Mutsunori Uenuma, Masaharu Kobayashi, Yukiharu Uraoka,
"Ternary amorphous oxide semiconductor of In–Ga–O system for three-dimensional integrated device application" , IEEE Sensors Journal, vol. 25, no. 11, pp. 19497-19505 (2025)

3）Sunbin Hwang and Junya Kurumida,
"Temperature Distribution Sensor for Real-Time Monitoring of Thermal Interface Material" , APL Mater. 13, 051101 (2025)

4）Sunbin Hwang, Mutsunori Uenuma, Junya Kurumida,
"The Platform to Characterizing the Thermoelectric Materials by Photo-Crosslinked Ionic Gel Electrolyte" , Adv. Electron. Mater. 2500042 (2025)

5）Sri Ayu Anggraini, Masato Uehara, Kenji Hirata, Taisei Motomura, Hiroshi Yamada, Morito Akiyama,
"Effect of Si addition on polarity inversion in scandium aluminum nitride piezoelectric thin films" , Scripta Materialia, 258, 116253 (2025)

6）Sri Ayu Anggraini, Yuki Fujio,
"Zirconia-based Electrochemical Sensor Utilizing Au-based Electrodes for Rapid Hydrogen Detection" , 2024 IEEE Sensors, 1-4 (2024)

7） Taisuke Kageura, Yosuke Sasama, Tokuyuki Teraji, Kenji Watanabe, Takashi Taniguchi, Keisuke Yamada, Kosuke Kimura, Shinobu Onoda, Yamaguchi Takahide,
"Spin-state control of shallow single NV centers in hydrogen-terminated diamond" , ACS Appl. Mater. Interfaces, 16, 13212 (2024)

8）Taisuke Kageura, Yosuke Sasama, Keisuke Yamada, Kosuke Kimura, Shinobu Onoda, Yamaguchi Takahide,
"Surface transfer doping of hydrogen-terminated diamond probed by shallow nitrogen-vacancy centers" , Carbon, 29, 119404 (2024)

9）Masato Uehar, Kenji Hirata, Yoshiko Nakamura, Sri Ayu Anggraini, Kazuki Okamoto, Hiroshi Yamada, Hiroshi Funakubo, Morito Akiyama,
"Excellent piezoelectric and ferroelectric properties of ScxGa1−xN alloy with high Sc concentration" , APL Mater., 12, 121102 (2024)


1）Takanori Takahashi, Mutsunori Uenuma, Masaharu Kobayashi, Yukiharu Uraoka,
"Positive Bias Instability Issues and Their Suppression Techniques in Atomic Layer Deposited In-Ga-O Channel Transistors" , 2025 32nd International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD)

2）Anlan Chen, Ki-woong Park, Kota Sakai, Sunbin Hwang, Xingyu Huang, Takuya Saraya, Toshiro Hiramoto, Takanori Takahashi, Mutsunori Uenuma, Yukiharu Uraoka, and Masaharu Kobayash,
"A Gate-All-Around Nanosheet Oxide Semiconductor Transistor by Selective Crystallization of InGaOx for Performance and Reliability Enhancement" , 2025 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits)


1）黄 善彬、坂井 洸太、髙橋 崇典、上沼 睦典、浦岡 行治、小林 正治
「ナノシート酸化物半導体―電極界面における電子状態の分析」、応用物理学会秋季学術講演会、16a-Y1311-2、東京理科大学、2025年3月16日

1）2025/06/06　プレスリリース
「ゲートオールアラウンド型 ナノシート酸化物半導体トランジスタを開発――半導体の高集積化・高機能化へ期待――」

2）2024/12/04　産総研プレスリリース
「低消費電力なメモリデバイスに貢献する新材料の開発に成功」

・特開2022-128755
・特開2021-039995
・特許7260863