In order to realize Society 5.0, we develop sensor devices to collect data from human and various objects which can be the source of valuables information leading to solve the social problems that could not be solved so far.　The valuable information can also be create new service market. We will develop the multimodal sensor devices (such as pressure, temperature, heat flow and humidity) , energy harvesting device and low damage mounting technology in order to collect information ambiently. We will be advance the development for the sensor device system to contributes to human enhancement technology.