P313
Controlling of the behavior of Silicon nano-sized particles in laser
ablation process by an electric field
Yoshiki Nakata,
Junichi Muramoto,
Ippei Sakamoto,
Tatsuo Okada,
Mitsuo Maeda
Kyushu university, Graduate School of
Information Science and Electrical Engineering
We have investigated the condensation process of Si nano-sized particles in
pulsed-laser ablation process by two-dimensional laser induced fluorescence
(2D-LIF) and ultra-violet laser light scattering (UV-LLS) techniques. The
spatial distributions of the particles condensed in gas phase, observed by
these techniques, showed that the particles flew beyond the substrate and
the deposition efficiency was low. We proposed the controlling of the
behavior of particles by an electric field. Observed results showed that
the most particles moved along the electric field, and that showed the
particles were charged. The numbers of the deposited particles onto a
substrate increased by an electric field.
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