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Innovative Plasma Processing Group

Group Outline and Primary Goal

To realize a safe and secure society, using the advanced plasma technology, we have been engaged in research and development of the extremely energy-saving and environment-friendly electronic devices.

Key Themes of Research

1) Research and Development of carbon material;
  • High heat dissipation material for the multilayer integrated circuit
2) Research and Development of nitride material;
  • BN film for the semiconductor
  • LED material
  • Green laser
3) Research and Development of life science;
  • International standardization of low energy ionized gas coagulation equipment (IEC / TC 62 - SC 62D - WG34 Project)
  • R&D guideline of low energy ionized gas coagulation equipment
  • Drag manufacturing for cancer treatment using low energy and high reactive plasma technology

Our Technologies and Equipment

  • Plasma production technologies under the low, middle, or high pressure region, plasma production technologies based on the solid material (without using gas and liquid), ion beam technologies, pulsed electron beam technologies, numerical simulation technique, and diagnostics
  • Plasma equipment under the low, middle, or high pressure region, Raman microscopy, XRD, ESR, TOF-MASS, spectrometers (UV, visible, near-infrared), infrared camera, ion beam system, YAG laser and high voltage power supplies

Articles

・Yutaka Fujiwara, Yoichi Hirano, Satoru Kiyama, Akihisa Nakamiya, Haruhisa Koguchi and Hajime Sakakita, “Electron density profile measurements at a self-focusing ion beam with high current density and low energy extracted through concave electrodes”, Rev. Sci. Instrum. 85, 02A726 (2014) 1-3. doi:10.1063/1.4827680.
・Yoichi Hirano, Satoru Kiyama, Haruhisa Koguchi, and Hajime Sakakita, “Self-focusing of a high current density ion beam extracted with concave electrodes in a low energy region around 150 eV”, Rev. Sci. Instrum. 85, 02A728 (2014) 1-3. doi:10.1063/1.4849676.
・Jaeho Kim, Hajime Sakakita, Hiroyuki Osaki, and Makoto Katsurai, “Microwave-excited atmospheric pressure plasma jet with wide aperture for the synthesis of carbon nanomaterials”,Japanese Journal of Applied Physics 54, pp.01AA02 (2015/01).
・S. Kato, S. Kurimura, H. H. Lim, and N. Mio, “Induced heating by nonlinear absorption in LiNbO3-type crystals under continuous-wave laser irradiation“, Optical Materials 40, 10-13 (2015).
・Yutaka Fujiwara, Hajime Sakakita, Hiromasa Yamada, Yusuke Yamagishi, Hirotomo Itagaki, Satoru Kiyama, Masaori, Fujiwara, Yuzuru Ikehara, and Jaeho Kim, “Observations of multiple stationary striation phenomena in an atmospheric pressure neon plasma jet”, Japanese Journal of Applied Physics 55-010301, pp.1-4 (2015).
・Hiromasa Yamada, Yusuke Yamagishi, Hajime Sakakita, Shuichiro Tsunoda, Jiro Kasahara, Masanori Fujiwara, Susumu Kato, Hirotomo Itagaki, Jaeho Kim, Satoru Kiyama, Yutaka Fujiwara, Yuzuru Ikehara, Sanae Ikehara, Hayao Nakanishi, Nobuyuki Shimizu, “Bending and turbulent enhancement phenomena of neutral gas flow containing an atmospheric pressure plasma by applying external electric fields measured by schlieren optical method”, Japanese Journal of Applied Physics 55-01AB08, pp.1-5 (2015).
・Jaeho Kim, Hajime Sakakita, Microwave Discharges: Fundamentals and Applications, MICROWAVE EXCITED ATMOSPHERIC PRESSURE PLASMA JET USING MICROSTRIP LINE FOR THE SYNTHERSIS OF CARBON NANOMATERIALS,UCOPress, Cordoba University Press (2015/12).
・Hajime Sakakita, Satoru Kiyama, Jaeho Kim, Hiromasa Yamada, Isao Masukane, Toru Niwa, Nobuyuki Shimizu, Yasuyuki Seto, Masao Ichinose, and Yusuru Ikehara, “Study of the Power Distribution of Each Impedance in the Electrical Circuit of Ionized Gas Coagulation Equipment”, Plasma Medicine, 5-2, pp.189-203 (2015).
・Jaeho Kim, Hajime Sakakita, Hiromasa Yamada, Sanae Ikehara, Hayao Nakanishi, Toru Niwa, Nobuyuki Shimizu, Masao Ichinose, and Yusuru Ikehara, “Study on Thermal Characteristics of Ionized Gas Coagulation Equipment”, Plasma Medicine 5-2, pp.99-108 (2015).
・Yutaka Fujiwara, Hajime Sakakita, Akihisa Nakamiya, Yoichi Hirano, and Satoru Kiyama, “Effects of a Dielectric Material in an Ion Source on the Ion Beam Current Density and Ion Beam Energy”, Rev. Sci. Instrum. 87, 02B930 (2016) 1-3.
・Hirotomo Itagaki, Shingo Hirose, Jaeho Kim, Mutsuo Ogura, X.-L. Wang, Atsushi Nonaka, Hisato Ogiso, and Hajime Sakakita, “A low power nitriding technique utilizing a microwave excited radical flow”, Japanese Journal of Applied Physics 55, 6S2 (2016) 1-5.
・Hiromasa Yamada, Hajime Sakakita, Susumu Kato, Jaeho Kim, Satoru Kiyama, Masanori Fujiwara, Hirotomo Itagaki, Toshiya Okazaki, Sanae Ikehara, Hayao Nakanishi, Nobuyuki Shimizu and Yuzuru Ikehara, “Spectroscopy of reactive species produced by low-energy atmospheric-pressure plasma on conductive target material surface”, J. Phys. D: Appl. Phys. 49, 394001 (2016) 1-11.
・Hiromasa Yamada, Tetsuji Shimizu, Masanori Fujiwara, Susumu Kato, Yutaka Fujiwara, Hirotomo Itagaki, Satoru Kiyama, Jaeho Kim, Sanae Ikehara, Nobuyuki Shimizu Hayao Nakanishi, Yuzuru Ikehara, and Hajime Sakakita, “Measurements of emission-propagation phenomena in low-energy atmospheric-pressure helium plasma, PLASMA SOURCES SCIENCE & TECHNOLOGY 27 (2018) 05LT02 (5pp).

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Electronics and Photonics Research Institute

Tsukuba Central 2, 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568 JAPAN
phone: +81-29-861-3490  fax: +81-29-861-5627 Email:esprit-sec-ml@aist.go.jp