Intense slow positron beam

National Institute of Advanced Inductrial Science and Technology (AIST)

Intense Slow Positron Beam Facility

Members
Ryoichi Suzuki (Leader)
Toshiyuki Ohdaira
(Advanced quantum particle beam research group, Photonics Research Institute, AIST)

Collaborators

Yoshinori Kobayashi、Koichi Hirata (Metrology Institute, AIST),
Shoji Ishibashi (Research Institute for Computational Science, AIST),
Akira Uedono (Tsukuba University),
Yoshimi Shioya (Semiconductor Process Laboratory Co., Ltd.),
Y. C. Jean (University of Missouri-Kansas City, USA),
Jun Xu (Oak Ridge National Laboratory, USA),
etc.

Topics　Characterization of sub-nanometer-sized voids in low-k dielectrics

Generation of the intense slow positron beam with an electron LINAC

Beam intensity 10⁸　positrons/s (max)
Transport energy 5 eV

Pulsing of the slow positron beam

Applications of pulsed positron beams

1. Positron-Annihilation Lifetime Spectroscopy (PALS) - Depth selective, High rate (>4000 cps)

Porous Silicon
Amorphous Silicon
Silicon on Insulator (SOI)
GaN
Low-k dielectrics
Polymers

2. Age-Momentum Correlation Spectroscopy (AMOC) - Depth selective, High rate (>1000 cps)

SiO2 -Si interface

3.Positron-Annihilation Induced Auger-Electron Spectroscopy (PAES) - Characterization of the top surface layer.

Oxidation of Silicon

4. Compact-size PALS system

List of publication (2001- )

Contact:

Ryoichi Suzuki　(r-suzuki @ aist.go.jp)
Toshiyuki Ohdaira (Toshiyuki-Ohdaira @ aist.go.jp)

AIST Tsukuba Central-2, Tsukuba, Ibaraki 305-8568, Japan
Photonics Research Institute,
National Institute of Advanced Industrial Science and Technology (AIST)