| Groups |
|
| Integration Process Technology Group |
| Ingenious Micro-Manufacturing Systems Group |
| Low-Formability-Materials Processing Group |
| Flexible Chemical Coating Group |
| Tribology Group |
| Crystal and Materials Processing Group |
| Thin Films Processing Group |
| Functional and Structural Damage Verification Group |
| Surface Interactive Design Group |
| System Functional Design Group |
| Manufacturing Information Group |
| Metal Processing Group |
| Processing Fundamentals Research Group |